Thermionic emission filament, quadrupole mass spectrometer and residual gas analyzing method
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United States of America Patent
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Jul 17, 2018
Grant Date -
Jun 15, 2017
app pub date -
Dec 7, 2016
filing date -
Dec 11, 2015
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Abstract
In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament including a core member through which electric current flows and an electron emitting layer which is formed so as to cover a surface of the core member, the electron emitting layer is configured to have denseness for substantial gas-tight integrity.
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