Anti-transient showerhead

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10023959
APP PUB NO 20160348242A1
SERIAL NO

15163594

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Abstract

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Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hamilton, Shawn M Boulder Creek, US 9 208
Smith, Colin F Half Moon Bay, US 11 833
Sung, Edward Milpitas, US 13 84

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