Multifunctional particle analysis device and method of calibrating the same
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United States of America Patent
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Mar 11, 2016
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Jun 23, 2015
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Abstract
A multifunctional particle analysis device includes a particle measuring device and a particle composition analysis device. Calibration particles for which at least the number, size, and composition thereof are known are input to the particle measuring device and the particle composition analysis device and analyzed. The sensitivity of the particle measuring device is calibrated in accordance with the number and size of the calibration particles as measured by the particle measuring device, and the sensitivity of the particle composition analysis device is calibrated in accordance with the mass composition of the calibration particles as measured by the particle composition analysis device. Moreover, the irradiation axis of particles that enter the particle composition analysis device relative to a capturing unit is calibrated in accordance with a state in which the calibration particles are captured on the capturing unit of the particle composition analysis device.
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