Chunming Zhou

Inventor

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Work History

Patent OwnerApplications FiledYear
FRANCE BREVETS
1
2012
NOVELLUS SYSTEMS, INC.
3
1
1
2010
2011
2012

Inventor Addresses

AddressDuration
Fremont, CA, USNov 05, 20 - Jan 07, 25
Milipitas, CA, USJun 21, 12 - Apr 30, 13
Milpitas, CA, USMar 22, 12 - Aug 15, 13

Technology Profile

Technology Matters
C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS 1
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 7
C23F: NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
121911982025Low resistivity tungsten film and method of manufacture0
121762052024Method and chamber for backside physical vapor deposition0
121424782024Method and chamber for backside physical vapor deposition0
120947732024Methods for low resistivity and stress tungsten gap fill0
117988452023Methods and apparatus for low resistivity and stress tungsten gap fill0

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