Chunming Zhou
Inventor
Stats
- 1 US patents issued
- 12 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 1 US Patents Issued
- 12 US Applications Filed
- 37 Total Citation Count
- Jun 19, 2023 Most Recent Filing
- Mar 16, 2010 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
FRANCE BREVETS | 1
| 2012
|
NOVELLUS SYSTEMS, INC. | 3
1 1 | 2010
2011 2012 |
Inventor Addresses
Address | Duration |
---|---|
Fremont, CA, US | Nov 05, 20 - Jan 07, 25 |
Milipitas, CA, US | Jun 21, 12 - Apr 30, 13 |
Milpitas, CA, US | Mar 22, 12 - Aug 15, 13 |
Technology Profile
Technology | Matters | |
---|---|---|
C03C: | CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS | 1 |
C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 7 |
C23F: | NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES | 2 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
12191198 | 2025 | Low resistivity tungsten film and method of manufacture | 0 |
12176205 | 2024 | Method and chamber for backside physical vapor deposition | 0 |
12142478 | 2024 | Method and chamber for backside physical vapor deposition | 0 |
12094773 | 2024 | Methods for low resistivity and stress tungsten gap fill | 0 |
11798845 | 2023 | Methods and apparatus for low resistivity and stress tungsten gap fill | 0 |
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