Yanpo ZHAO
Inventor
Stats
- 3 US patents issued
- 4 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 4 US Applications Filed
- 14 Total Citation Count
- Apr 17, 2015 Most Recent Filing
- Jun 5, 2014 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| TSINGHUA UNIVERSITY | 3
4 | 2014
2015 |
| BEIJING U-PRECISION TECH CO., LTD. | 4
| 2015
|
Inventor Addresses
| Address | Duration |
|---|---|
| Beijing, CN | May 19, 16 - Feb 27, 18 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 2 |
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 2 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 9903704 | 2018 | Three-DOF heterodyne grating interferometer displacement measurement system | 1 |
| 9904183 | 2018 | Coarse motion and fine motion integrated reticle stage driven by planar motor | 0 |
| 9791789 | 2017 | Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor | 0 |
| 2017/0115,580 | 2017 | COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PLANAR MOTOR | 4 |
| 2017/0052,461 | 2017 | MAGNETICALLY SUSPENDED COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PLANAR MOTOR | 0 |
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