Charles B Zarowin
Inventor
Stats
- 11 US patents issued
- 11 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 11 US Patents Issued
- 11 US Applications Filed
- 625 Total Citation Count
- Feb 5, 1996 Most Recent Filing
- Sep 1, 1981 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| INTEGRATED PROCESS EQUIPMENT CORP. | 3
2 1 | 1991
1992 1993 |
| LAM RESEARCH CORPORATION | 1
| 1981
|
| ASML HOLDING N.V. | 1
| 1985
|
| HUGHES ELECTRONICS CORPORATION | 1
| 1995
|
| SVG LITHOGRAPHY, INC., A CORP OF DE | 1
| 1985
|
| ASML US, LLC | 1
| 1985
|
| NOVELLUS SYSTEMS, INC. | 1
| 1996
|
| Hughes Aircraft Company | 1
| 1995
|
| The Perkin-Elmer Corporation | 1
1 | 1981
1986 |
Inventor Addresses
| Address | Duration |
|---|---|
| Pacific Palisades, CA | Sep 22, 98 - Sep 22, 98 |
| Rowayton, CT | Feb 14, 84 - Dec 27, 94 |
| Studio City, CA | Apr 30, 02 - Apr 30, 02 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B01K: | 1 | |
| B23K: | SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM | 1 |
| B32B: | LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 6379490 | 2002 | System for improving the total thickness variation of a wafer | 4 |
| 5811021 | 1998 | Plasma assisted chemical transport method and apparatus | 26 |
| 5376224 | 1994 | Method and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substrates | 29 |
| 5336355 | 1994 | Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and films | 39 |
| 5298103 | 1994 | Electrode assembly useful in confined plasma assisted chemical etching | 23 |
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