Vaibhaw Vishal

Inventor

Add to Portfolio

Stats

Details

Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
4
2
1
2011
2013
2016

Inventor Addresses

AddressDuration
Fremont, CA, USAug 09, 12 - Oct 19, 21

Technology Profile

Technology Matters
B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM 1
G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR 3
G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE 1

See more…

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
111501402021Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications0
100838522018Floating wafer chuck0
2017/0219,4372017Instrumented Substrate Apparatus for Acquiring Measurement Parameters in High Temperature Process Applications7
95149702016Methods of attaching a module on wafer substrate1
91341862015Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces2

See more…


We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level.
> Upgrade to our Level for up to -1 portfolios!.