Vaibhaw Vishal
Inventor
Stats
- 3 US patents issued
- 5 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 5 US Applications Filed
- 13 Total Citation Count
- Jul 18, 2017 Most Recent Filing
- Feb 3, 2011 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
KLA-TENCOR CORPORATION | 4
2 1 | 2011
2013 2016 |
Inventor Addresses
Address | Duration |
---|---|
Fremont, CA, US | Aug 09, 12 - Oct 19, 21 |
Technology Profile
Technology | Matters | |
---|---|---|
B32B: | LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM | 1 |
G01K: | MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR | 3 |
G01L: | MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE | 1 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
11150140 | 2021 | Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications | 0 |
10083852 | 2018 | Floating wafer chuck | 0 |
2017/0219,437 | 2017 | Instrumented Substrate Apparatus for Acquiring Measurement Parameters in High Temperature Process Applications | 7 |
9514970 | 2016 | Methods of attaching a module on wafer substrate | 1 |
9134186 | 2015 | Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces | 2 |
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