Eric R Vaughan
Inventor
Stats
- 2 US patents issued
- 3 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 3 US Applications Filed
- 158 Total Citation Count
- Nov 27, 2001 Most Recent Filing
- Jan 13, 2000 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| SILICON VALLEY GROUP, THERMAL SYSTEMS LLC | 2
| 2001
|
| AVIZA TECHNOLOGY, INC. | 2
| 2001
|
| SILICON VALLEY GROUP, THERMAN SYSTEMS, LLC | 1
| 2000
|
| ASML US, INC. | 1
1 | 2000
2001 |
Inventor Addresses
| Address | Duration |
|---|---|
| Santa Cruz, CA | Aug 02, 01 - Jan 25, 05 |
| Santa Cruz, CA, US | Mar 21, 02 - Mar 21, 02 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B25J: | MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES | 1 |
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 2 |
| C23F: | NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 6846149 | 2005 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | 30 |
| 6610150 | 2003 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | 29 |
| 2002/0033,136 | 2002 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | 38 |
| 2001/0010,950 | 2001 | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system | 8 |
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