Yoichi Usui
Inventor
Stats
- 3 US patents issued
- 5 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 5 US Applications Filed
- 37 Total Citation Count
- Dec 28, 2018 Most Recent Filing
- Jul 4, 2003 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
HOYA CORPORATION | 2
2 2 1 | 2003
2008 2014 2017 |
Inventor Addresses
Address | Duration |
---|---|
Tokyo, JP | Oct 27, 05 - Jan 07, 20 |
Technology Profile
Technology | Matters | |
---|---|---|
B32B: | LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM | 3 |
G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 5 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
10527927 | 2020 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | 0 |
2019/0155,141 | 2019 | CONDUCTIVE FILM COATED SUBSTRATE, MULTILAYER REFLECTIVE FILM COATED SUBSTRATE, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | 0 |
10209614 | 2019 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | 0 |
2017/0315,439 | 2017 | CONDUCTIVE FILM COATED SUBSTRATE, MULTILAYER REFLECTIVE FILM COATED SUBSTRATE, REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | 2 |
9746762 | 2017 | Conductive film coated substrate, multilayer reflective film coated substrate, reflective mask blank, reflective mask, and semiconductor device manufacturing method | 5 |
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