Wilhelm Ulrich

Inventor

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Work History

Patent OwnerApplications FiledYear
CARL ZEISS MICROSCOPY GMBH
1
2014
Carl-Zeiss-Stiftung
1
1
1
2
2
4
1
1
1
1989
1990
1997
2001
2002
2003
2004
2005
2007
CARL ZEISS SMT GMBH
2
4
16
17
32
12
25
21
13
15
16
13
10
6
6
1
2
2000
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
ASML NETHERLANDS B.V.
1
2006
MASCHINENFABRIK KEMPER GMBH & CO KG
2
2003
Zeiss, Car
1
2002
CARL ZEISS OPTRONICS GMBH
3
1
1997
2000
Carl Zeiss Semiconductor
1
2002
CARL ZEISS SMT AG
1
2
2
10
9
6
8
4
3
2
9
1993
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
CARL ZEISS AG
1
1
2014
2015

Inventor Addresses

AddressDuration
AALEN, DEJul 08, 10 - Jul 08, 10
Aalen, Baden-Wurttemberg, DEDec 28, 10 - Dec 28, 10
Aalen, DEOct 16, 90 - Nov 19, 19
Aalen, DE, USDec 13, 01 - Dec 13, 01
Aalen-Dewangen, DEApr 04, 02 - May 13, 08
Aalen-dewangen, DEMar 24, 09 - Mar 24, 09
Aalendewangen, DEJun 12, 08 - Jun 12, 08
Dewangen, DEJul 29, 03 - Jul 29, 03

Technology Profile

Technology Matters
A61B: DIAGNOSIS; SURGERY; IDENTIFICATION 1
A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 1
B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
104815002019Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type0
2019/0072,8612019LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE DEFECTS OF THE SAME0
100732562018Device for imaging sample0
99648592018Lithography projection objective, and a method for correcting image defects of the same0
2018/0031,8152018CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES0

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