Edric H Tong

Inventor

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Work History

Patent OwnerApplications FiledYear
TENCOR INSTRUMENTS
1
1988
TOKYO ELECTRON LIMITED
3
2001

Inventor Addresses

AddressDuration
Santa Cruz, CAMar 13, 90 - Mar 13, 90
Sunnyvale, CAFeb 14, 02 - Jun 03, 03
Sunnyvale, CA, USMay 30, 02 - Feb 27, 25

Technology Profile

Technology Matters
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 1
B65H: HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES 1
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2025/0069,8592025APPARATUS TO IMPROVE PROCESS NON-UNIFORMITY FOR SEMICONDUCTOR DIRECT PLASMA PROCESSING0
65724562003Bathless wafer measurement apparatus and method0
2002/0065,0282002Bathless wafer measurement apparatus and method0
2002/0018,2172002Optical critical dimension metrology system integrated into semiconductor wafer process tool105
49079311990Apparatus for handling semiconductor wafers33

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