SIYUAN TIAN

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
1
2016

Inventor Addresses

AddressDuration
Fremont, CA, USJan 04, 18 - Dec 19, 24
GUANGDONG, CNFeb 14, 19 - Feb 14, 19
Guangdong, CNJun 23, 20 - Jun 23, 20
Houston, TX, USDec 21, 17 - Feb 19, 19
Newark, CA, USMar 03, 22 - Mar 13, 25
Zhuhai, CNOct 25, 18 - May 03, 22

Technology Profile

Technology Matters
B23P: OTHER WORKING OF METAL; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS 1
B29D: PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE 1
B82Y: SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2025/0087,5182025LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELECTROSTATIC CHUCK WITH MULTIPLEXED HEATERS ARRAY0
2024/0417,8572024CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS0
121548142024Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array0
120778622024Connector for substrate support with embedded temperature sensors0
2024/0136,2142024LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELECTROSTATIC CHUCK WITH MULTIPLEXED HEATERS ARRAY0

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