Shankar Swaminathan

Inventor

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Work History

Patent OwnerApplications FiledYear
WILLIAM MARSH RICE UNIVERSITY
1
1992
LAM RESEARCH CORPORATION
4
16
14
12
2013
2014
2015
2016
R-PHARM US OPERATING LLC
2
1
2001
2005
NOVELLUS SYSTEMS, INC.
4
2
9
4
1
2
2011
2012
2013
2014
2015
2016
MIASOLE
1
2014
BRISTOL-MYERS SQUIBB COMPANY
1
2
1
2
1997
1999
2001
2004

Inventor Addresses

AddressDuration
Beaverton, CA, USSep 03, 15 - Jun 12, 18
Beaverton, OR, USJul 31, 14 - Mar 25, 25
Cyberjaya, MYMar 31, 22 - Aug 15, 23
Hillsboro, CA, USOct 20, 11 - Oct 20, 11
Hillsboro, OR, USFeb 02, 12 - May 15, 18
Houston, TXDec 06, 94 - Dec 06, 94
Monmouth Junction, NJJan 02, 03 - Oct 17, 06
Monmouth Junction, NJ, USSep 22, 05 - Sep 22, 05
North Brunswick, NJJun 02, 98 - Feb 04, 03
North Brunswick, NJ, USJun 02, 98 - Jun 02, 98
Phoenix, AZ, USFeb 28, 19 - Mar 27, 25

Technology Profile

Technology Matters
A61K: PREPARATIONS FOR MEDICAL, DENTAL, OR TOILET PURPOSES 2
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 5
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2025/0101,5812025APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CHAMBERS WITH FLUORINE-BASED RADICALS0
122610382025Gapfill of variable aspect ratio features with a composite PEALD and PECVD method0
2025/0092,5132025METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS AND RELATED SEMICONDUCTOR DEVICE STRUCTURES INCLUDING A MOLYBDENUM NITRIDE FILM0
122154162025Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film0
2025/0029,8342025METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM ON A DIELECTRIC SURFACE OF A SUBSTRATE AND RELATED SEMICONDUCTOR DEVICE STRUCTURES0

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