Robert F Steimle

Inventor

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Work History

Patent OwnerApplications FiledYear
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
2
2
2003
2004
NORTH STAR INNOVATIONS INC.
2
2
6
8
11
6
2
2002
2003
2004
2005
2006
2007
2008
NXP USA, INC.
2
2
2
2
6
2
10
4
3
2003
2004
2007
2010
2012
2013
2014
2015
2016

Inventor Addresses

AddressDuration
AUSTIN, TX, USNov 02, 17 - Nov 02, 17
Austin, TXFeb 10, 04 - Nov 25, 08
Austin, TX, USJan 29, 04 - Jun 05, 18

Technology Profile

Technology Matters
B81B: MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES 10
B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS 11
G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT 3

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
99882602018Rough MEMS surface1
2017/0313,5732017ROUGH MEMS SURFACE6
97768532017Reducing MEMS stiction by deposition of nanoclusters1
96373722017Bonded wafer structure having cavities with low pressure and method for forming1
95506642017Reducing MEMS stiction by increasing surface roughness2

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