Christian Sparka
Inventor
Stats
- 1 US patents issued
- 2 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 1 US Patents Issued
- 2 US Applications Filed
- 6 Total Citation Count
- Mar 6, 2017 Most Recent Filing
- Aug 30, 2013 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| KLA-TENCOR CORPORATION | 2
1 | 2013
2017 |
Inventor Addresses
| Address | Duration |
|---|---|
| Dresden, DE | Mar 06, 14 - Jul 02, 19 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 1 |
| G01C: | MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY | 1 |
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 2 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 10340165 | 2019 | Systems and methods for automated multi-zone detection and modeling | 1 |
| 2017/0287,754 | 2017 | Systems and Methods for Automated Multi-Zone Detection and Modeling | 4 |
| 9291920 | 2016 | Focus recipe determination for a lithographic scanner | 0 |
| 2014/0063,478 | 2014 | Focus Recipe Determination for a Lithographic Scanner | 2 |
We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level.
>
Upgrade to our Level for up to -1 portfolios!.