Axel Soulet

Inventor

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Work History

Patent OwnerApplications FiledYear
AIR LIQUIDE ELECTRONICS U.S. LP
5
2
2008
2012
AMERICAN AIR LIQUIDE, INC.
3
2008

Inventor Addresses

AddressDuration
Berkeley, CA, USJun 04, 09 - Nov 26, 13
Oakland, CA, USFeb 05, 09 - Feb 05, 09

Technology Profile

Technology Matters
B01F: MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING 3
G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED BY A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR 1
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
85910952013Reclaim function for semiconductor processing system3
2013/0028,0432013RECLAIM FUNCTION FOR SEMICONDUCTOR PROCESSING SYSTEM3
82355802012Reclaim function for semiconductor processing systems5
81913972012Methods for checking and calibrating concentration sensors in a semiconductor processing chamber1
2009/0151,4192009Methods For Checking And Calibrating Concentration Sensors In A Semiconductor Processing Chamber6

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