Kay SONG

Inventor

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Work History

Patent OwnerApplications FiledYear
AIXTRON SE
2
2014
NOVELLUS SYSTEMS, INC.
1
2011
EUGENE TECHNOLOGY, INC.
2
2014

Inventor Addresses

AddressDuration
San Jose, CA, USApr 05, 12 - Feb 07, 17

Technology Profile

Technology Matters
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
95643292017Method and apparatus for fabricating dielectric structures0
2015/0155,1572015Method and Apparatus for Fabricating Dielectric Structures9
2012/0083,1342012METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES286

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