Colin F Smith

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
5
3
1
2014
2015
2016
NOVELLUS SYSTEMS, INC.
1
1
1
2002
2006
2007
BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD.
1
2011

Inventor Addresses

AddressDuration
Half Moon Bay, CAJul 06, 04 - Jul 06, 04
Half Moon Bay, CA, USJun 15, 10 - Nov 29, 18

Technology Profile

Technology Matters
B01D: SEPARATION 1
B01F: MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING 1
B65H: HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2018/0340,2562018ANTI-TRANSIENT SHOWERHEAD9
101074902018Configurable liquid precursor vaporizer0
100239592018Anti-transient showerhead14
99823412018Modular vaporizer6
98630412018Internally heated porous filter for defect reduction with liquid or solid precursors0

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