Nimrod Shuall

Inventor

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Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
2
2013

Inventor Addresses

AddressDuration
Beaverton, OR, USJan 24, 19 - Mar 21, 24
Nofit, ILMar 06, 14 - May 03, 16

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 2
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 2
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0093,9852024SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURES OF A BONDED SAMPLE0
108179992020Image-based overlay metrology and monitoring using through-focus imaging1
105656972020Utilizing overlay misregistration error estimations in imaging overlay metrology0
103794492019Identifying process variations during product manufacture0
2019/0122,3572019UTILIZING OVERLAY MISREGISTRATION ERROR ESTIMATIONS IN IMAGING OVERLAY METROLOGY4

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