Richard A Seilheimer
Inventor
Stats
- 4 US patents issued
- 4 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 4 US Patents Issued
- 4 US Applications Filed
- 292 Total Citation Count
- Oct 19, 1992 Most Recent Filing
- Aug 25, 1987 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| SILICON VALLEY GROUP, INC. | 1
| 1991
|
| APPLIED MATERIALS, INC. | 1
1 1 | 1987
1991 1992 |
Inventor Addresses
| Address | Duration |
|---|---|
| Pleasanton, CA | Mar 27, 90 - Jun 14, 94 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B65G: | TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS | 1 |
| B66C: | CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES | 1 |
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 5320680 | 1994 | Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow | 39 |
| 5280983 | 1994 | Semiconductor processing system with robotic autoloader and load lock | 79 |
| 5224809 | 1993 | Semiconductor processing system with robotic autoloader and load lock | 36 |
| 4911597 | 1990 | Semiconductor processing system with robotic autoloader and load lock | 104 |
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