James Allen Schlueter

Inventor

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Work History

Patent OwnerApplications FiledYear
VERSUM MATERIALS US, LLC
2
8
4
5
3
1
2008
2013
2014
2015
2016
2017

Inventor Addresses

AddressDuration
Phoenix, AZ, USMar 05, 09 - Nov 24, 22
Tempe, AZ, USJun 06, 19 - Jun 06, 19

Technology Profile

Technology Matters
B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 6
B44C: PRODUCING DECORATIVE EFFECTS 1
C01F: COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS 4

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2022/0372,3322022With-In Die Non-Uniformities (WID-NU) In Planarization0
110665752021Chemical mechanical planarization for tungsten-containing substrates0
2020/0308,4522020Low Temperature Mechanical Polishing Or Planarization Slurry For Surfactant Solubility0
2020/0277,5142020Chemical Mechanical Polishing For Copper And Through Silicon Via Applications0
107455892020Chemical mechanical polishing (CMP) of cobalt-containing substrate0

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