Yuzo Sakurada

Inventor

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Work History

Patent OwnerApplications FiledYear
Nihon Shinku Gijutsu Kabushiki Kaisha
1
1
2
1989
1990
1996
ULVAC CO.,LTD
2
2005
ULVAC, INC.
2
2001

Inventor Addresses

AddressDuration
Chigasaki, JPMay 12, 98 - Aug 16, 05
Chigasaki-shi, JPJun 06, 02 - Jun 06, 02
Fujisawa, JPJan 08, 91 - Jan 08, 91
Kanagawa, JPJul 02, 91 - Jul 02, 91
Susono, JPMar 31, 09 - Mar 31, 09
Susono-City Sizuoka, JPMar 06, 08 - Mar 06, 08

Technology Profile

Technology Matters
G21G: CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES 1
G21K: TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 1
H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 5

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
75112882009Ion implantation device7
2008/0054,1922008Ion Implantation Device0
69303162005Ion implantation system and ion implantation method30
2002/0066,8722002Ion implantation system and ion implantation method9
58381121998Parallel scan type ion implanter5

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