Genji Sakata

Inventor

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Work History

Patent OwnerApplications FiledYear
ULVAC, INC.
1
2
1
2008
2011
2012

Inventor Addresses

AddressDuration
Chigasaki, JPJun 18, 24 - Jun 18, 24
Chigasaki-shi, JPOct 30, 14 - Oct 30, 14
Kanagawa, JPFeb 28, 13 - Jan 13, 15
Susono-shi, JPJun 17, 10 - Jun 17, 10

Technology Profile

Technology Matters
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 2
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
120149462024Electrostatic chuck, vacuum processing apparatus, and substrate processing method0
89328962015Solar cell manufacturing apparatus and solar cell manufacturing method0
2014/0318,6082014SOLAR CELL MANUFACTURING METHOD AND SOLAR CELL1
2013/0052,7712013Solar Cell Manufacturing Apparatus and Solar Cell Manufacturing Method0
2010/0151,1502010PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF DEPOSITION-INHIBITORY MEMBER4

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