Chia-I Shen
Inventor
Stats
- 3 US patents issued
- 9 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 9 US Applications Filed
- 98 Total Citation Count
- Jul 24, 2020 Most Recent Filing
- Jan 13, 2000 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. | 1
2 4 1 1 | 2000
2011 2013 2014 2015 |
Inventor Addresses
| Address | Duration |
|---|---|
| Hsin-Chu, TW | Apr 04, 13 - Nov 18, 14 |
| Hsinchu City, TW | Sep 11, 14 - Nov 12, 20 |
| Hsinchu, TW | Jun 02, 15 - Aug 11, 20 |
| Kaoshiung, TW | Oct 15, 02 - Oct 15, 02 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B05B: | SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES | 1 |
| B65G: | TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS | 1 |
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 5 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2020/0357,612 | 2020 | WAFER PROCESSING METHOD | 0 |
| 10741366 | 2020 | Process chamber and wafer processing method | 0 |
| 10669625 | 2020 | Pumping liner for chemical vapor deposition | 1 |
| 2018/0308,665 | 2018 | PROCESS CHAMBER AND WAFER PROCESSING METHOD | 0 |
| 10008367 | 2018 | Gas diffuser unit, process chamber and wafer processing method | 3 |
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