Michael Rumer
Inventor
Stats
- 2 US patents issued
- 6 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 6 US Applications Filed
- 53 Total Citation Count
- Jul 12, 2023 Most Recent Filing
- Sep 29, 2000 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| NOVELLUS CORPORATION | 1
| 2000
|
| LAM RESEARCH CORPORATION | 1
1 | 2014
2016 |
| NOVELLUS SYSTEMS, INC. | 1
| 2000
|
Inventor Addresses
| Address | Duration |
|---|---|
| Santa Clara, CA | May 02, 06 - May 02, 06 |
| Santa Clara, CA, US | Feb 04, 16 - Jan 16, 25 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 4 |
| G01N: | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES | 1 |
| G02B: | OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2025/0019,830 | 2025 | PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING | 0 |
| 11725285 | 2023 | Preventing deposition on pedestal in semiconductor substrate processing | 0 |
| 2021/0230,749 | 2021 | PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCESSING | 0 |
| 10895539 | 2021 | In-situ chamber clean end point detection systems and methods using computer vision systems | 1 |
| 10832936 | 2020 | Substrate support with increasing areal density and corresponding method of fabricating | 1 |
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