Pablo Rovira

Inventor

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Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
1
2015

Inventor Addresses

AddressDuration
Milpitas, CA, USJun 11, 20 - Jan 24, 23
Santa Clara, CA, USApr 21, 16 - Mar 08, 22

Technology Profile

Technology Matters
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 2
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 4
G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM] 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
115622892023Loosely-coupled inspection and metrology system for high-volume production process monitoring0
112689012022Variable aperture mask0
2020/0271,5692020Variable Aperture Mask0
2020/0184,3722020Loosely-Coupled Inspection and Metrology System for High-Volume Production Process Monitoring1
106633922020Variable aperture mask0

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