Robert J Rafac

Inventor

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Work History

Patent OwnerApplications FiledYear
ASML NETHERLANDS B.V.
5
10
3
2013
2014
2015
CYMER, INC.
1
1
2
2
2003
2004
2007
2013
CYMER, LLC
2
4
2
4
4
3
2
2003
2004
2005
2006
2010
2012
2013

Inventor Addresses

AddressDuration
Carlsbad, CAJan 13, 05 - Feb 14, 08
Carlsbad, CA, USDec 30, 04 - Jun 08, 10
Encinitas, CAAug 12, 08 - Aug 12, 08
Encinitas, CA, USDec 20, 07 - Mar 29, 16
San Diego, CA, USJun 16, 16 - Dec 06, 16

Technology Profile

Technology Matters
B05D: PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 8
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 7

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
95167292016Variable radius mirror dichroic beam splitter module for extreme ultraviolet source2
2016/0174,3512016Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ultraviolet Source4
RE459572016Regenerative ring resonator2
92392692016Calibration of photoelectromagnetic sensor in a laser source5
92392682016Calibration of photoelectromagnetic sensor in a laser source2

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