Thomas Petasch

Inventor

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Work History

Patent OwnerApplications FiledYear
CARL ZEISS SMT AG
3
1
2002
2004
Carl-Zeiss-Stiftung
1
2002
CARL ZEISS SMT GMBH
4
2
5
2
7
2
3
2
1
3
2002
2004
2005
2006
2008
2012
2013
2015
2016
2017
DEUTSCHES ZENTRUM FUER LUFT- UND RAUMFAHRT E.V.
1
2002
MARMON UTILITY LLC
1
1
2002
2004

Inventor Addresses

AddressDuration
Aalen, DEOct 24, 02 - Sep 29, 22

Technology Profile

Technology Matters
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 2
G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR 1
G02B: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 15

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2022/0308,4662022DEVICE FOR CLEANING A SURFACE IN THE INTERIOR OF AN OPTICAL SYSTEM0
105208262019Optical element, optical assembly and production method1
2019/0121,2402019OPTICAL ELEMENT, OPTICAL ASSEMBLY AND PRODUCTION METHOD0
2019/0025,7092019LITHOGRAPHIC PROJECTION OBJECTIVE0
101755822019Optical element, optical assembly and production method1

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