Kee-Soo Park

Inventor

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Work History

Patent OwnerApplications FiledYear
SAMSUNG ELECTRONICS CO., LTD.
1
1
2005
2017

Inventor Addresses

AddressDuration
Hwaseong-si, KRJan 11, 18 - Jun 18, 20
Suwon-si, KRFeb 26, 08 - Feb 26, 08

Technology Profile

Technology Matters
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 2
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 1
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2020/0194,2352020APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE0
105411822020Method of inspecting semiconductor substrate and method of manufacturing semiconductor device1
2019/0096,7732019METHOD OF INSPECTING SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE1
101967382019Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system1
2018/0010,2432018DEPOSITION PROCESS MONITORING SYSTEM, AND METHOD OF CONTROLLING DEPOSITION PROCESS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SYSTEM293

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