Haejoong Park

Inventor

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Work History

Patent OwnerApplications FiledYear
SAMSUNG ELECTRONICS CO., LTD.
4
2015

Inventor Addresses

AddressDuration
Suwon-si, KRFeb 04, 16 - Mar 06, 18
Yongin-Si, KRFeb 04, 21 - Feb 04, 21
Yongin-si, KROct 13, 22 - Jan 28, 25

Technology Profile

Technology Matters
H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 3
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2
H01T: SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
122116722025Apparatus and method for plasma etching0
2024/0258,0842024APPARATUS AND METHOD FOR PLASMA ETCHING0
119843042024Apparatus and method for plasma etching0
2022/0328,2912022APPARATUS AND METHOD FOR PLASMA ETCHING0
2021/0035,8302021SEMICONDUCTOR MANUFACTURING APPARATUS1

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