Ryan Michael Pakulski

Inventor

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Work History

Patent OwnerApplications FiledYear
MATTSON TECHNOLOGY, INC.
1
2005

Inventor Addresses

AddressDuration
Brentwood, CA, USDec 14, 23 - Jun 04, 24
Discovery Bay, CASep 22, 05 - Sep 22, 05

Technology Profile

Technology Matters
C23F: NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 1
H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
120026592024Apparatus for generating etchants for remote plasma processes0
2023/0402,2622023APPARATUS FOR GENERATING ETCHANTS FOR REMOTE PLASMA PROCESSES0
2005/0205,2102005Advanced multi-pressure workpiece processing14

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