Thomas Adriaan Ooms
Inventor
Stats
- 3 US patents issued
- 4 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 4 US Applications Filed
- 18 Total Citation Count
- Jun 12, 2017 Most Recent Filing
- Mar 30, 2012 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| MAPPER LITHOGRAPHY IP B.V. | 4
2 1 | 2012
2013 2017 |
Inventor Addresses
| Address | Duration |
|---|---|
| Delfgauw, NL | Oct 04, 12 - Sep 28, 17 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G01B: | MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS | 4 |
| G03B: | APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR | 1 |
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 4 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2017/0277,043 | 2017 | LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE | 1 |
| 9678443 | 2017 | Lithography system with differential interferometer module | 0 |
| 9551563 | 2017 | Multi-axis differential interferometer | 1 |
| 9261800 | 2016 | Alignment of an interferometer module for use in an exposure tool | 2 |
| 2015/0241,200 | 2015 | MULTI-AXIS DIFFERENTIAL INTERFEROMETER | 2 |
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