ICHIRO ONOZAWA

Inventor

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Work History

Patent OwnerApplications FiledYear
SHIN-ETSU HANDOTAI CO., LTD.
2
2015

Inventor Addresses

AddressDuration
Annaka, JPNov 10, 16 - Feb 13, 18

Technology Profile

Technology Matters
B01D: SEPARATION 1
C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
98900442018Method for recovering and purifying argon gas from silicon single crystal manufacturing apparatus and apparatus for recovering and purifying argon gas0
2016/0325,9962016METHOD FOR RECOVERING AND PURIFYING ARGON GAS FROM SILICON SINGLE CRYSTAL MANUFACTURING APPARATUS AND APPARATUS FOR RECOVERING AND PURIFYING ARGON GAS1

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