Tsutomu Ohshimo

Inventor

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Work History

Patent OwnerApplications FiledYear
KAIJO CORPORATION
2
2003
DOWA MINING CO., LTD.
2
2003

Inventor Addresses

AddressDuration
Fussa, JPJul 01, 08 - Jul 01, 08
Tokyo, JPJul 08, 04 - Jul 08, 04

Technology Profile

Technology Matters
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
73928122008Substrate processing apparatus and substrate transporting device mounted thereto2
2004/0129,3002004Substrate processing apparatus and substrate transporting device mounted thereto5

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