VIETHA NGUYEN
Inventor
Stats
- 2 US patents issued
- 8 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 8 US Applications Filed
- 58 Total Citation Count
- Dec 27, 2018 Most Recent Filing
- Jun 23, 2015 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| SAMSUNG ELECTRONICS CO., LTD. | 1
3 | 2015
2016 |
Inventor Addresses
| Address | Duration |
|---|---|
| Yongin-si, KR | May 12, 16 - Feb 09, 21 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G03F: | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR | 1 |
| H01J: | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | 1 |
| H01L: | SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | 8 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 10916437 | 2021 | Methods of forming micropatterns and substrate processing apparatus | 0 |
| 2019/0198,342 | 2019 | Methods of Forming Micropatterns and Substrate Processing Apparatus | 1 |
| 10304734 | 2019 | Semiconductor devices and methods of manufacturing the same | 0 |
| 10192782 | 2019 | Method of manufacturing semiconductor device using a plurality of etch stop layers | 2 |
| 10186485 | 2019 | Planarized interlayer dielectric with air gap isolation | 0 |
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