Daria Negri

Inventor

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Details

Work History

Patent OwnerApplications FiledYear
KLA—Tencor Corporation
1
2016
KLA-TENCOR CORPORATION
2
4
6
2
1
2
2010
2011
2013
2014
2015
2016

Inventor Addresses

AddressDuration
Haifa, ILJun 07, 18 - Dec 10, 24
Milpitas, CA, USAug 29, 24 - Aug 29, 24
Nesher, ILMar 24, 11 - Mar 18, 25

Technology Profile

Technology Matters
F21V: FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR 3
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 16
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
122538052025Scatterometry overlay metrology with orthogonal fine-pitch segmentation0
122221992025Systems and methods for measurement of misregistration and amelioration thereof0
121702152024Systems and methods for correction of impact of wafer tilt on misregistration measurements0
121659302024Adaptive modeling misregistration measurement system and method0
121319592024Systems and methods for improved metrology for semiconductor device wafers0

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