Terumi Muguruma

Inventor

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Work History

Patent OwnerApplications FiledYear
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC.
1
2002
KABUSHIKI KAISHA TOSHIBA
1
1
1
2
2
2
1990
1998
1999
2001
2003
2004

Inventor Addresses

AddressDuration
Kanagawa-ken, JPJul 31, 01 - Aug 09, 05
Kawasaki, JPDec 05, 02 - Dec 05, 02
Tokyo, JPMar 15, 94 - Sep 26, 00

Technology Profile

Technology Matters
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 2
B65B: MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING 1
B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 3

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
69260292005Wafer container13
2005/0098,2182005WAFER CONTAINER1
68835392005Wafer container22
2004/0055,6502004Wafer container10
2002/0182,0372002Substrate processing apparatus, substrate processing system, and substrate conveying method3

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