Lucas Morin

Inventor

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Inventor Addresses

AddressDuration
Kilchberg, CHNov 21, 24 - Nov 21, 24

Technology Profile

Technology Matters
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2024/0385,5052024DRY PHOTORESIST OR HARDMASK FOR EUV LITHOGRAPHY0

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