Katsuhiko Miya

Inventor

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Work History

Patent OwnerApplications FiledYear
SCREEN HOLDINGS CO., LTD.
4
6
2
12
4
5
5
4
4
4
4
2003
2005
2006
2007
2008
2011
2012
2014
2015
2016
2017
DAINIPPON SCREEN MFG. CO., LTD.
1
2
3
1
5
4
7
1
1
1
1997
2002
2003
2004
2005
2006
2007
2008
2009
2015

Inventor Addresses

AddressDuration
Kyoto, JPSep 26, 02 - Mar 25, 21
Kyoto-shi, JPMar 29, 12 - Sep 10, 15
Shiga, JPJul 27, 99 - Jul 27, 99

Technology Profile

Technology Matters
B01D: SEPARATION 2
B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 1
B05C: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2021/0090,9102021SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD1
106198942020Substrate processing apparatus and substrate processing method0
106128442020Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method0
105866932020Substrate processing apparatus and substrate processing method0
102864252019Substrate cleaning method and substrate cleaning apparatus3

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