Nicholas E Miller

Inventor

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Work History

Patent OwnerApplications FiledYear
SILICON VALLEY GROUP, INC.
1
2
1
1
1982
1983
1984
1991
APPLIED MATERIALS, INC.
1
1987

Inventor Addresses

AddressDuration
Cupertino, CAJun 25, 85 - Jun 14, 94

Technology Profile

Technology Matters
B05D: PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1
C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 5

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
53206801994Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow39
47940191988Refractory metal deposition process12
45474041985Chemical vapor deposition process5
45453271985Chemical vapor deposition apparatus69
45399331985Chemical vapor deposition apparatus31

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