MASSIMILIANO MERLI

Inventor

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Work History

Patent OwnerApplications FiledYear
STMICROELECTRONICS S.R.L.
2
1
2016
2017

Inventor Addresses

AddressDuration
Pavia, ITAug 10, 21 - Mar 04, 25
Stradella, ITJun 08, 17 - Dec 26, 24
Stradella, Pavia, ITFeb 20, 20 - Sep 14, 23

Technology Profile

Technology Matters
B81B: MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES 18
B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS 6
G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE 3

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
122420512025Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration properties0
122224922025Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes0
2024/0425,3592024MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURING PROCESS THEREOF0
121176052024Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof0
121176082024MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform0

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