Jan Andries MEIJER

Inventor

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Work History

Patent OwnerApplications FiledYear
MAPPER LITHOGRAPHY IP B.V.
2
2
2
1
2011
2012
2013
2014

Inventor Addresses

AddressDuration
Rotterdam, NLNov 22, 12 - Nov 21, 23

Technology Profile

Technology Matters
B82Y: SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES 4
G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 1
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
RE497322023Charged particle lithography system with alignment sensor and beam measurement sensor0
96650142017Charged particle lithography system with alignment sensor and beam measurement sensor0
92403062016Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device0
2015/0179,3982015CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH SENSOR ASSEMBLY0
90306752015Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus3

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