Xiaoxu Lu

Inventor

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Work History

Patent OwnerApplications FiledYear
KLA-TENCOR CORPORATION
4
2
4
2014
2015
2016
VISA INTERNATIONAL SERVICE ASSOCIATION
1
2016

Inventor Addresses

AddressDuration
Foster City, CA, USNov 16, 17 - Feb 18, 20
San Jose, CA, USDec 11, 14 - Oct 01, 19

Technology Profile

Technology Matters
G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 1
G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1
G02B: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
105655732020Reported location correction system0
104297192019183 nm CW laser and inspection system1
2019/0107,7662019183 nm CW Laser and Inspection System0
101755552019183 nm CW laser and inspection system7
100441662018CW DUV laser with improved stability6

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