Shurong Liang
Inventor
Stats
- 7 US patents issued
- 28 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 7 US Patents Issued
- 28 US Applications Filed
- 142 Total Citation Count
- Oct 19, 2022 Most Recent Filing
- Jun 29, 2004 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. | 5
2 1 | 2015
2016 2017 |
| INTEL CORPORATION | 1
| 2004
|
| INTERMOLECULAR, INC. | 1
| 2014
|
| GLOBALFOUNDRIES INC. | 2
6 | 2013
2014 |
Inventor Addresses
| Address | Duration |
|---|---|
| Hillsboro, OR | Dec 29, 05 - Dec 29, 05 |
| Lynnfield, MA, US | Jan 09, 18 - Jul 11, 24 |
| Poughkeepsie, NY, US | Jan 01, 15 - Mar 24, 20 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| B08B: | CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL | 2 |
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 4 |
| C23F: | NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES | 2 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2024/0234,156 | 2024 | SELECTIVE TRENCH MODIFICATION USING DIRECTIONAL ETCH | 0 |
| 2024/0234,161 | 2024 | MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH | 0 |
| 11984318 | 2024 | Directional modification of patterning structure to enhance pattern elongation process margin | 0 |
| 2024/0136,197 | 2024 | MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH | 1 |
| 2024/0136,194 | 2024 | SELECTIVE TRENCH MODIFICATION USING DIRECTIONAL ETCH | 0 |
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