Chang-Yun Lee
Inventor
Stats
- 2 US patents issued
- 6 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 2 US Patents Issued
- 6 US Applications Filed
- 452 Total Citation Count
- Jun 24, 2019 Most Recent Filing
- Feb 20, 2009 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| SAMSUNG ELECTRO-MECHANICS CO., LTD. | 1
| 2009
|
| SAMSUNG ELECTRONICS CO., LTD. | 1
2 1 | 2009
2014 2017 |
Inventor Addresses
| Address | Duration |
|---|---|
| HWASEONG-SI, KR | Jun 18, 15 - Jun 18, 15 |
| Hwaseong-Si, KR | Jun 07, 16 - Jun 07, 16 |
| Hwaseong-si, KR | May 11, 10 - Jun 18, 20 |
| Suwon-si, KR | Jan 14, 10 - Jan 14, 10 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| C23C: | COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | 4 |
| C23F: | NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES | 1 |
| F15D: | FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 2020/0194,235 | 2020 | APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE | 0 |
| 10541182 | 2020 | Method of inspecting semiconductor substrate and method of manufacturing semiconductor device | 1 |
| 2019/0096,773 | 2019 | METHOD OF INSPECTING SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | 1 |
| 10196738 | 2019 | Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the system | 1 |
| 2018/0010,243 | 2018 | DEPOSITION PROCESS MONITORING SYSTEM, AND METHOD OF CONTROLLING DEPOSITION PROCESS AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SYSTEM | 293 |
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