Maire Michel Le
Inventor
Stats
- 3 US patents issued
- 5 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 3 US Patents Issued
- 5 US Applications Filed
- 47 Total Citation Count
- Jul 27, 2020 Most Recent Filing
- May 5, 2006 Earliest Filing
Work History
| Patent Owner | Applications Filed | Year |
|---|---|---|
| CARL ZEISS LASER OPTICS GMBH | 1
1 | 2006
2008 |
| CARL ZEISS SMT GMBH | 2
2 | 2006
2010 |
| CARL ZEISS SMT AG | 1
| 2006
|
Inventor Addresses
| Address | Duration |
|---|---|
| Meisengasse1 | Oct 01, 09 - Oct 01, 09 |
| Oberkochen, DE | Nov 06, 08 - Aug 10, 21 |
Technology Profile
| Technology | Matters | |
|---|---|---|
| G01J: | MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY | 1 |
| G02B: | OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS | 4 |
| H01J: | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | 1 |
Patents / Publication
| Patents / Publication # | Year of Publication / Issued | Title | Citations |
|---|---|---|---|
| 11087955 | 2021 | System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination | 2 |
| 2021/0035,773 | 2021 | SYSTEM COMBINATION OF A PARTICLE BEAM SYSTEM AND A LIGHT-OPTICAL SYSTEM WITH COLLINEAR BEAM GUIDANCE, AND USE OF THE SYSTEM COMBINATION | 14 |
| 10777958 | 2020 | Beam reverser module and optical power amplifier having such a beam reverser module | 0 |
| 2018/0102,620 | 2018 | Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module | 0 |
| 8342701 | 2013 | Reflective optical element for use in an EUV system | 8 |
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