Stephan Lassig

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH CORPORATION
1
1
1
2
2
2001
2002
2004
2008
2016
NOVELLUS SYSTEMS, INC.
1
2002

Inventor Addresses

AddressDuration
Danville, CAApr 05, 05 - Apr 05, 05
Danville, CA, USFeb 26, 04 - Jan 09, 18

Technology Profile

Technology Matters
B44C: PRODUCING DECORATIVE EFFECTS 1
C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS 1
C23F: NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 1

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
98654722018Fabrication of a silicon structure and deep silicon etch with profile control3
2016/0233,1022016FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL0
93309262016Fabrication of a silicon structure and deep silicon etch with profile control4
2009/0184,0892009FABRICATION OF A SILICON STRUCTURE AND DEEP SILICON ETCH WITH PROFILE CONTROL22
68756992005Method for patterning multilevel interconnects4

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