Otto LACH
Inventor
Stats
- 7 US patents issued
- 8 US Applications filed
- most recent filing
This is official USPTO record data
Details
- 7 US Patents Issued
- 8 US Applications Filed
- 68 Total Citation Count
- Oct 12, 2012 Most Recent Filing
- Dec 18, 2009 Earliest Filing
Work History
Patent Owner | Applications Filed | Year |
---|---|---|
LAM RESEARCH AG | 4
4 3 4 | 2009
2010 2011 2012 |
LAM RESEARCH AB | 1
| 2011
|
Inventor Addresses
Address | Duration |
---|---|
TREFFEN, AT | Jun 23, 11 - Apr 17, 14 |
Treffen, AT | Oct 20, 11 - Nov 01, 16 |
Technology Profile
Technology | Matters | |
---|---|---|
B08B: | CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL | 4 |
B23B: | TURNING; BORING | 2 |
B23Q: | DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING | 2 |
Patents / Publication
Patents / Publication # | Year of Publication / Issued | Title | Citations |
---|---|---|---|
9484229 | 2016 | Device and method for processing wafer-shaped articles | 4 |
9190310 | 2015 | Grounded chuck | 3 |
9147593 | 2015 | Apparatus for liquid treatment of wafer shaped articles | 3 |
9130002 | 2015 | Device for holding wafer shaped articles | 0 |
9093482 | 2015 | Method and apparatus for liquid treatment of wafer shaped articles | 6 |
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