Otto LACH

Inventor

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Details

Work History

Patent OwnerApplications FiledYear
LAM RESEARCH AG
4
4
3
4
2009
2010
2011
2012
LAM RESEARCH AB
1
2011

Inventor Addresses

AddressDuration
TREFFEN, ATJun 23, 11 - Apr 17, 14
Treffen, ATOct 20, 11 - Nov 01, 16

Technology Profile

Technology Matters
B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 4
B23B: TURNING; BORING 2
B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING 2

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
94842292016Device and method for processing wafer-shaped articles4
91903102015Grounded chuck3
91475932015Apparatus for liquid treatment of wafer shaped articles3
91300022015Device for holding wafer shaped articles0
90934822015Method and apparatus for liquid treatment of wafer shaped articles6

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