HELMUT MARCO LOY

Inventor

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Work History

Patent OwnerApplications FiledYear
LAM RESEARCH AG
1
2015

Inventor Addresses

AddressDuration
Wernberg, ATMay 25, 17 - May 25, 17

Technology Profile

Technology Matters
H01L: SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1

Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
2017/0148,6522017SPIN CHUCK WITH IN SITU TEMPERATURE MONITORING2

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