BYUNG-IN KWON

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Inventor Addresses

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Singapore, SGJun 18, 20 - Oct 10, 23

Technology Profile

Technology Matters
B01D: SEPARATION 1
F24F: AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING 1
G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 6

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Patents / Publication

Patents / Publication #Year of Publication / IssuedTitleCitations
117798712023Exhaust module for wafer baking apparatus and wafer processing system having the same0
116933072023Reticle pod for preventing haze contamination and reticle stocker having the same0
113421842022Method of forming multiple patterned layers on wafer and exposure apparatus thereof0
113405232022Correction method of photomask pattern0
2021/0208,5162021RETICLE STAGE FOR PREVENTING HAZE CONTAMINATION AND EXPOSURE APPARATUS HAVING THE SAME0

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